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Miniature Combination Ion PumpIon + NEG

Sputter ion pump + NEG getter in one · pumps without power · compact CF16

A miniature combination pump for ultra-high-vacuum (UHV) systems, integrating a sputter ion pump with a non-evaporable getter (NEG) in a single compact body: the ion pump removes inert gases and methane while the NEG absorbs hydrogen and active gases at high speed — complementary mechanisms that sustain UHV from a very small package. The NEG needs no power, so pumping continues during outages and transport. The getter activates at just 180 °C, so a normal system bakeout completes activation with no separate step. A matched controller and HV cable are included, delivering 2800~5000 V and reading vacuum in real time from the ion current (10⁻³~10⁻¹¹ Pa). The ideal main pump for magneto-optical traps (MOTs), neutral-atom quantum computers, optical clocks and precision measurement.

LinQ Quantum miniature combination ion pump (ion pump + NEG)
0.8 / 2 / 5 L/sIon pumping speed (three models)
20 / 25 / 400 L/sGetter (NEG) pumping speed
180 °CGetter activation
CF16Compact vacuum flange (CF25 on 5 L/s)

Key Features

Small size, high pumping speed — designed for space-constrained UHV systems.

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Ion Pump + NEG in One

Two complementary mechanisms: the sputter ion pump handles inert gases while the NEG absorbs hydrogen and active gases at high speed — big pumping capability from a miniature body.

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Activates in a Normal Bakeout

Getter activation at just 180 °C — your standard system bakeout activates it automatically, with no separate high-temperature activation step. Simpler commissioning.

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Pumps Without Power

The NEG getter pumps hydrogen and other active gases with no power applied, holding vacuum through outages and system transport.

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Matched Controller Included

Ships with a matched control power supply and HV cable: 2800~5000 V output, with real-time vacuum readout from the ion current (10⁻³~10⁻¹¹ Pa) — no extra gauge needed.

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Compact & Lightweight

CF16 / CF25 flanges and a miniature, lightweight body for space-constrained systems, mountable in any orientation.

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Works With LinQ Products

Pairs with LinQ's 2D-MOT, 3D-MOT and Mini-MOT cold-atom sources and alkali metal dispensers for a complete UHV cold-atom solution.

Specifications

See the user manual for full specifications, drawings, and installation, bake-out and start-up procedures.

Pump TypeMiniature combination ion pump (sputter ion pump + non-evaporable getter, NEG)
Models0.8 L/s / 2 L/s / 5 L/s
Ion Pump Speed0.8 L/s / 2 L/s / 5 L/s
NEG Pumping Speed20 L/s (0.8 L/s model) / 25 L/s (2 L/s model) / 400 L/s (5 L/s model)
Vacuum Readout Range1×10⁻³ ~ 1×10⁻¹¹ Pa (read in real time from ion current)
Getter Activation180 °C — activated during a normal system bakeout, no separate step
Max. Bake-out Temperature< 300 °C (magnet included — no need to remove it)
As ShippedEvacuated and sealed
Output Voltage2800~5000 V DC
Included AccessoriesControl power supply; magnet; 3 m bakeable, radiation-resistant SHV HV cable with interlock
Flange0.8 and 2 L/s models CF16 (DN16, 1.33″); 5 L/s model CF25 (DN25, 2.12″)
HV ConnectorSHV (5 kV)
Dimensions0.8 L/s model approx. 55 × 31 × 59 mm; 2 L/s model approx. 84 × 38 × 74 mm; 5 L/s model approx. 108 × 36 × 83 mm (incl. flange and HV connector)
MountingAny orientation
Typical ApplicationsCold-atom systems / quantum computing / optical clocks / metrology / analytical instruments

Application Fields

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Cold Atom Systems

Maintains UHV in MOT and science chambers, extending trapped-atom lifetimes — the ideal main pump for 2D-MOT / 3D-MOT / Mini-MOT systems.

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Quantum Computing

Long-term, maintenance-free vacuum for neutral-atom and trapped-ion quantum computers.

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Optical Clocks & Metrology

Vibration-free, low-disturbance clean vacuum for optical clocks, atom interferometers and frequency standards.

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Portable & Compact Instruments

The miniature, lightweight design suits portable quantum sensors and compact analytical instruments where size and weight matter.

The right ion pump for your system

Need sizing advice, speed curves, or volume pricing? Get in touch with our team.

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